Abstract. Atomic force microscope (AFM) could be used as a micro-machining tool if it is equipped with a diamond tip instead of a normal imaging tip. Alternatively the AFM diamond tip could also be used as a nano-indeming tool following the micro-machining process in reatizing the measurement of the mechanical properties inside and outside the micro-machined region. The results show that tbr the AFM-based micro-machining with a diamond tip on chemical-mechanical polished silicon wafer, the deformed layer could be formed even under very small machining force, however it is smaller than the deformed layer formed by means of chemical-mechanical polishing. The hand-scaled hardness values of silicon measured by AFM are bigger than the hardness values measured by tradbionaI Vickers and Hysitron indenting tester. In addition, as the indenting loads decreases, the hand-scaled hardness values present a trend of increasing, which was considered due to the indenting size effect under very small indenting loads.

bstract. In this paper, micro machining is performed using AFM diamond lip, which is similar to a gin abrasive particle, and a high precision stage. Using mechanical scratching, microstructures are maehined on the surface of single crystal copper. Based on the system, some experimenls are carried out: parameters such as velocity of machining, applied force and amount of feed, which will influence procass of micro machining, are analyzed. The diamond tip state's influence on micro machining is also studied. And using the optimum parameters and proper machinin technique, the microstructures are machined. This approach is a no,.el unconventional micro machining technology. It can be applied in some micro machining fields such as: MEMS micro deqces' fabrication, mask fabrication of ulithography, micro pars micro machining, and machining or dressing on the micro-parts fabricaled by other ways.

Traditional micromachining methods arc are difficult to achieve three-dimensional machining of microstructurcs. To solve this problem. a 3D machining method based on a SPM and a precision stage is proposed, in which the diamond tip of the SPM is used to scratch the sample surface. Bused on the two-dimensional machining technique, the 3D machining technique was bstudied. The machining mechanism and machining prperties of the microstructuresat were investigated. Different SPM working modes were also studied. The microstructures were The method provide a new way for manufacturing the 3D icrostructures such as the moulds of micro of micro sensors and micro parts.

Based on the geometrical features of the AFM (Atomic Force Microscope) diamond tip as well as the interac-tion existed between the diamond tip and the machined material, a theoretical model egarding single asperity cutting is put lobar th The experiments are conducted on various materials including AI-althy, single ctystaI germanium and silicon with differnt normal loads and cutting speed. On the basis of the theoretical analysis verified with the experimental re-suits, a study of cuttthg process on llano-scale in tern of cutting force and various material removal mechanism is carded out

采用分子动力学三维模型研究单晶硅纳米切削机理，工件原子间相互作用力和二件与刀具原子问相互作用力分别采用Tersoff势和Mores势计算。通过切削过程甲瞬间原子图像、能量和切削力的分析，发现在整个切削过程中，发生了非晶态相位的变和切屑体积的改变，但没有明显的位错和弹性恢复产生。其中切削力的一个分力以句力在非晶态相住变换形成时起主要作用，另一分力轴向力是非晶态扩展的三要素。兰晶硅纳米切削机理不是位错在晶体中运动产生的塑性变形，而是非晶相相枉之援产生的变形。

本文建立了微动工作台和原子力显微镜相结合的微加工系统，在该系统上采用金刚石针尖进行微加工实验，与SPM系统本身的刻划软件刻划出的图形进行了比较分析，得出这个系统适合微结构的加工；并给出了采用该方法加工的圆面及多边形面微结约；还分析了金刚石会尖几何角度及SPM和工作台的相关参参数对加工的影响。

扫描探针显微镜（SPM）使人们不仅可以观察到物质表面的微观形貌。还可以微纳米尺度上对样品表面进行加工。这种方法有可能成为未来微纳米器件的主要制作方法，成为推动人类科学和技术发展的新动力。主要介绍基于SPM的三种纳米加工方法：单原于操纵法、阳极氧化法和机械刻蚀法。详细阐述了各自的原理、特点投发展状况，并指出阳捱氧化法是目前最有可能应用在实际生产制造中的加工方法。而机械刻蚀法对不仅可以作为纳米加工的手段，还可以应用于纳米加工机理方面的研究。

Nano machining technique based on SPM is newly advanced technique of manufacture. It Ls a non-traditional machining method Based on summarzing nano machining techniques using SPM recent years, our team's works in this field have been presented. Processing technique of CF Target Capsule's micro inflation hole using AFM which is one of SPM's modes, is studied. And processing properties of bdttle-matnflal, single crystal Ge, is also investigated. A micro machining system is established combing AFM and the high precision stage together. This system is used to machine microstructures and micro parts. A new method for machining two-dimensional and three-dimensional microstructures is, revealed It solves some problems which other micro machining methods can not solve or are dif-cutt to solve So it is an advanced techniaue of manufacture with a good outlook.

基于SPM的纳米加工是一种新兴的先进制造技术，是一种非传统的加工方法。本文在综述了近年来基于SPM纳术加工技术的发展状况基础上，介绍了我们近期在这方面的研究工作。我们采用SPM中的AFM：M。结合金刚石针尖，母究了核聚变激光靶球微充气孔的加工工艺及脆性材料单品锗的加工特性。并且我们还将AFM与精密工作台相结台，建立了一套微加工系统。用来加工微结构和微小零件。提供其一种加工二维及三维微小结构的方法。这种方法解决了其 它微纳米加工方法无法解决或难于解决的问题。是一种很有发展前的先进制造技术。

目前原子力显微镜（AFM）已经成为纳米加工领域中一种重要的加工手段，但由于其自身扫描管及针等目常的影响，AFM的微加工能力在很大程度上受到限制。利用三维徽动工作台结合原子力显徽镜以及锋利的金刚石针尖组成搬加工系统，通过编程获取微结构的轮廓，选择RS-232串口作为通讯方式，发送字符串命令控衬工作台的运动实现预定的轨迹，从而消除了扫描陶管运动范围有限且存在漂移和滞后的影响，解决了氮化硅和单晶硅针尖加工材料范围有限的问题。提升了AFM的加工能力，并加工出较为复杂的微结构传感器。实验表明这是一种可行的微加工方法。