已为您找到该学者28条结果 成果回收站
安希忠, Xizhong An, Yu Zhang, Guoquan Liu, Xiangge Qin, FuZhong Wang, Shengxin Liu
Journal of University of Science and Technology Beijing Volume 9, Number 6, December 2002, Page 453-457,-0001,():
-1年11月30日
The growth of {100}-oriented CVD diamond film under two modifications of J-B-H model at low substrate temperatures was simulated by using a revised KMC method at atomic scale. The results were compared both in Cl-containing systems and in C-H system as follows: (1) Substrate temperature can produce an important effect both on film deposition rate and on surface roughness; (2) Aomic Cl takes an active role for the growth of diamond film at low temperatures; (3) {100}-oriented diamond film cannot deposit under single carbon insertion mechanism, which disagrees with the predictions before; (4) The explanation of the exact role of atomic Cl is not provided in the simulation results.
CVD diamond film, atomic Cl, revised KMC (, Kinetic Monte Carlo), method, atomic scale simulation
-
35浏览
-
0点赞
-
0收藏
-
0分享
-
101下载
-
0
-
引用
【期刊论文】Analysis of the forces in ordered FCC packings with different orientations
安希忠, Xizhong An and Aibing Yu
Powder Technology,-0001,():
-1年11月30日
-
27浏览
-
0点赞
-
0收藏
-
0分享
-
43下载
-
0
-
引用
安希忠, AN Xi-Zhong, ZHANG Yu, LIU Guo-Quan, QIN Xiang-Ge, WANG Fu-Zhong, LIU Sheng-Xin
CHIN.PHYS.LETT. Vol. 19, No. 7 (2002) 1019,-0001,():
-1年11月30日
We simulate the {100}-oriented diamond f/lm growth of chemical vapour deposition (CVD) under different models in C-H and C-H-Cl systems in an atomic scale by using the revised kinetic Monte Carlo method. The simulation results show that: (1) the CVD diamond film growth in the C-H system is suitable for high substrate temperature, and the film surface roughness is very coarse; (2) the CVD diamond film can grow in the C-H-Cl system either at high temperature or at low temperature, and the film quality is outstanding; (3) atomic Cl takes an active role for the growth of diamond film, especially at low temperatures. The concentration of atomic Cl should be controlled in a proper range.
-
16浏览
-
0点赞
-
0收藏
-
0分享
-
138下载
-
0
-
引用