中国科技论文在线

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2007年11月22日

【期刊论文】Preparation and characterization of ITO films deposited on polyimide by reactive evaporation at low temperature

马瑾， Jin Ma， Dehang Zhang， Junqing Zhao， Chuenyu Tan， Tianlin Yang， Honglei Ma

Applied Surface Science 151 (1999) 239-243，-0001，（）：

-1年11月30日

Sn-doped indium oxide(ITO).films have been prepared on polyimide(PI).thin film substrate at low substrate temperature (80–240℃).by reactive evaporation. The samples were deposited as polycrystalline films with a cubic bixbyite structure and a preferred orientation with the(111).plan parallel to the substrate. The structural, optical and electrical properties of the obtained films depending on deposition temperature have been investigated. High quality films with resistivity as low as 7×10-4 V cm and transmittance over 80% have been obtained by suitably controlling the deposition parameters.

ITO films， Organic substrate， Reactive evaporation

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2007年11月22日

【期刊论文】Photoresponse of polycrystalline ZnO films deposited by r.f. bias sputtering

马瑾， D.H.Zhang， D.E.Brodie

Thin Solid Films 261 (1995) 334-339，-0001，（）：

-1年11月30日

摘要

The photoresponse of polycrystalline ZnO films generally contains both a true photoconductivity and a contribution from surface structural changes which can alter the surface conducatance via the chemisorption and photodesorption of an active ambient-gas component. The surface structural changes can increase the conductance by up to seven orders of magnitude for a 500nm thick sample when illuminated with an intensity of 4

Photoconductivity， Photodesorption， Sputtering， Zinc oxide

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2007年11月22日

【期刊论文】Optical and electronic properties of transparent conducting ZnO and ZnO:Al films prepared by evaporating method

马瑾， Ma Jin， Ji Feng， Zhang De-heng， Ma Hong-lei， Li Shu-ying

Thin Solid Films 357 (1999) 98-101，-0001，（）：

-1年11月30日

摘要

Undoped and Aluminium-doped Zinc oxide films have been prepared by thermal evaporation of zinc acetate (Zn(CH3COO)2

Zinc oxide， Optical properties， Electrical properties， Structural properties

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2007年11月22日

【期刊论文】Electrical and optical properties of ZnO:Al films prepared by an evaporation method

马瑾， Jin Ma， Feng Ji， Hong-lei Ma， Shu-ying Li

Thin Solid Films 279 (1996) 213-215，-0001，（）：

-1年11月30日

摘要

This paper describes the preparation of aluminium-doped zinc oxide films by thermal evaporation of zinc acetate(Zn(CH3COO)2

Conductivity， X-ray diffraction， Zinc oxide

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2007年11月22日

【期刊论文】Burstein shift usd UV photoresponse in IBAD-deposited transparent conducting ZnO films

马瑾， D.H.Zhang， R.W.Gao， H.L.Ma

Thin Solid Films 295 (1997) 83-86，-0001，（）：

-1年11月30日

摘要

A Burstein-Moss shift has been observed in highly transparent conducting zinc oxide films prepared by ion-bean-assisted reactive deposition. The optical gaps ranged from 3.27 to 4.1 eV increase with an increase in film conductivities and carrier concentrations. Annealing over 773K reduces conductivities by several orders of magnitude and subsequently narrows the optical gaps from 3.41 to 3.24 eV. When the films are irradiated with a UV light, they exhibit some photoresponse. The observed UV photoresponse can bi interpreted using oxygen photodesorption and chemisorption at the surface

Zinc oxide， Band structure， Optical properties， Photoresponse

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