中国科技论文在线

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2007年11月22日

【期刊论文】Optical and electronic properties of transparent conducting ZnO and ZnO:Al films prepared by evaporating method

马瑾， Ma Jin， Ji Feng， Zhang De-heng， Ma Hong-lei， Li Shu-ying

Thin Solid Films 357 (1999) 98-101，-0001，（）：

-1年11月30日

摘要

Undoped and Aluminium-doped Zinc oxide films have been prepared by thermal evaporation of zinc acetate (Zn(CH3COO)2

Zinc oxide， Optical properties， Electrical properties， Structural properties

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2007年11月22日

【期刊论文】Preparation and characterization of ITO films deposited on polyimide by reactive evaporation at low temperature

马瑾， Jin Ma， Dehang Zhang， Junqing Zhao， Chuenyu Tan， Tianlin Yang， Honglei Ma

Applied Surface Science 151 (1999) 239-243，-0001，（）：

-1年11月30日

摘要

Sn-doped indium oxide(ITO).films have been prepared on polyimide(PI).thin film substrate at low substrate temperature (80–240℃).by reactive evaporation. The samples were deposited as polycrystalline films with a cubic bixbyite structure and a preferred orientation with the(111).plan parallel to the substrate. The structural, optical and electrical properties of the obtained films depending on deposition temperature have been investigated. High quality films with resistivity as low as 7×10-4 V cm and transmittance over 80% have been obtained by suitably controlling the deposition parameters.

ITO films， Organic substrate， Reactive evaporation

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2007年11月22日

【期刊论文】Preparation of transparent conducting ZnO:Al films on polymer substrates by r. f. magnetron sputtering

马瑾， D.H. Zhang， T.L. Yang， J. Ma， Q.P. Wang， R.W. Gao， H.L. Ma

Applied Surface Science 158 (2000) 43-48，-0001，（）：

-1年11月30日

摘要

Highly transparent conducting Al-doped ZnO films with good adherence and low resistivity have been prepared on polymer substrates by r. f. magnetron sputtering. Mechanically stable polycrystalline conducting ZnO: Al films having a preferred orientation with the (002).planes parallel to the substrates were deposited on polyisocyanate(PI).substrate with resistivities in the range of 4.1×10-3 to 5.110-4 π cm, with carrier densities more than 2.6×1020 cm-3 and Hall mobilities between 5.78 and 13.11 cm2 V-1 s-1. The average transmittance exceeded 80% for a 440 nm thick film deposited on polypropylene adipate (PPA).substrate in the visible spectrum. The quality of obtained films depended on substrate temperatures, sputtering power, Ar pressures and compositions of used targets during film fabrication.

ZnO:Al， Polymer substrate， Sputtering， Transparent conducting films

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2007年11月22日

【期刊论文】Preparation and properties of indium tin oxide films deposited on polyester substraters by reactive evaporation

马瑾， Jin Ma， Shu-Ying Li， Jun-qing Zhao， Hong-Lei Ma

Thin Solid Films 307 (1997) 200-202，-0001，（）：

-1年11月30日

摘要

Highly transparent conducting indium tin oxide(ITO) films have been prepared on polyester thin film substrate by reactively evaporating metal In-Sn alloy in a system with an oxygen partial pressure of (3-30)×10-5 Torr and substrate temperatures between 80 and 240℃. The structure and opto-electrical properties of the films depending on the deposition conditions have been investigated. High quality films with a average transparency of 83% and the resistivity of 7×10-4 v cm have been obtained by controlling the deposition prameters.

Indium tin oxide， Polyester substrate， Reactive evaporation

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2007年11月22日

【期刊论文】Transparent conducting ZnO:Al films deposited on organic substrates deposited by r.f. magnetron-sputtering

马瑾， T.L. Yang， D.H. Zhang， J. Ma， H.L. Ma， Y. Chen

Thin Solid Films 326 (1998) 60-62，-0001，（）：

-1年11月30日

摘要

Transparent conducting ZnO:Al films with good adhesion and low resistivity have been prepared on organic substrates by r.f. magnetronsputtering. Polycrystalline ZnO:Al films having a preferred orientation were obtained with resistivity 1.84

ZnO:Al films， Organic substrates， Magnetron sputtering

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